Vacuum pump field
- Categories:Industry News
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- Time of issue:2022-02-19
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(Summary description)The vacuum pump unit scroll pump has been widely used in many fields: ①Semiconductor industry: thin film manufacturing equipment, semiconductor device packaging equipment; ②Scientific instrument industry: synchrotron radiation beamline machine, electron microscope, vacuum pump set aurora test equipment, analysis and testing equipment;
Vacuum pump field
(Summary description)The vacuum pump unit scroll pump has been widely used in many fields: ①Semiconductor industry: thin film manufacturing equipment, semiconductor device packaging equipment; ②Scientific instrument industry: synchrotron radiation beamline machine, electron microscope, vacuum pump set aurora test equipment, analysis and testing equipment;
- Categories:Industry News
- Author:
- Origin:
- Time of issue:2022-02-19
- Views:0
The vacuum pump unit scroll pump has been widely used in many fields: ①Semiconductor industry: thin film manufacturing equipment, semiconductor device packaging equipment; ②Scientific instrument industry: synchrotron radiation beamline machine, electron microscope, vacuum pump set aurora test equipment, analysis and testing equipment; ③Mechanical equipment industry: material preparation equipment, vacuum testing equipment, vacuum filtration equipment, material purification equipment, ultra-high vacuum exhaust equipment; ④Medical equipment industry: dental instruments, dialysis machines; biological product industry: material purification and drug preparation;⑤ Packaging industry: packaging equipment for food, medicine, biological products, etc.; ⑥ Vacuum metallurgy industry: vacuum furnace, nanomaterial preparation equipment, vacuum testing equipment and other fields. Scroll pump as the backing pump of molecular pump and small cryopump is the best configuration to obtain oil-free vacuum system. Its main moving part is only one movable scroll, so the power transmission is simple, the movement radius is small under the same size, the number of parts is small, the structure is simple and compact, and the size of the whole machine is small. The gap between the cavities is small, and the moving parts in the pump have no friction with the pump cavity, so there is almost no wear, smooth operation, low power consumption, small gas flow loss, high working reliability, long life, easy maintenance, low maintenance cost, and volumetric efficiency. high. Air-cooled, no water-cooling required.
The scroll vacuum pump has a high compression ratio and a stable pumping speed in a wide pressure range. Since the change of the compression chamber volume is continuous, the driving torque change is small, the power change is small, and the vibration noise is low, which is other Types of dry vacuum pumps that are not available. In order to achieve the effective operation of the scroll pump, the scroll profile must be well meshed in each vacuum cavity to avoid the deterioration of the force on the scroll wall, thermal deformation, and a part of the exhaust cavity due to factors such as large pressure difference in the vacuum cavity. High pressure gas stagnation and reduced vacuum pump efficiency. Therefore, it is necessary to ensure the precise containment and meshing between the scroll profiles, control the leakage of the working medium, and achieve the purpose of air extraction. This is an important basis for the structural design of the scroll pump. In the suction flow passage of the pump, it is not necessary to use any oil and sealing liquid as a medium, relying on the relative rotation of the moving and stationary scrolls to form a suction chamber and a compression chamber to discharge the pumped gas, and continuously complete the suction, compression and exhaust processes. . Therefore, how to prevent leakage and solve the problem of sealing is particularly important. The seal of the scroll pump mainly includes the radial seal of the axial meshing gap, and the tangential seal of the radial meshing gap, that is, the tooth side seal.
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